http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010019239-A1

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filingDate 2009-01-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9fc740860400b6e41f0579c7a0b162d4
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publicationDate 2010-01-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2010019239-A1
titleOfInvention Method of fabricating zto thin film, thin film transistor employing the same, and method of fabricating thin film transistor
abstract Provided are a method of fabricating a zinc-tin-oxide (ZTO) thin film, a thin film transistor employing the same, and a method of fabricating a thin film transistor. The method of fabricating a ZTO thin film includes depositing zinc oxide and tin oxide at a deposition temperature of 450° C. or lower so that a zinc-to-tin atomic ratio is 4:1 or greater, to form an amorphous ZTO thin film. In the thin film transistor, the ZTO thin film is used as a channel layer.
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