http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010018028-A1

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publicationDate 2010-01-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2010018028-A1
titleOfInvention Release layer for permanent master for patterned media manufacturing
abstract The invention relates to a method of manufacturing a patterned media Ni stamper comprising depositing a perfluorodecyltrichlorosilane release layer. The release layer eliminates bonding at the master-stamper interface. A permanent master for manufacturing a patterned media stamper is also provided.
priorityDate 2008-07-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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