| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f928e803faac3f56351da4f7ec7f56e2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_46f6b459c61b18bcc0bd03d85219d26d |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-0012
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-0081 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-08 |
| filingDate |
2009-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d475846ce8c3ae877ce400f522f4b066
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_91cb847f32a7aef8268ec3bb85a0c74d |
| publicationDate |
2010-01-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2010006417-A1 |
| titleOfInvention |
Capacitively-coupled electrostatic (cce) probe arrangement for detecting strike step in a plasma processing chamber and methods thereof |
| abstract |
A method for identifying a stabilized plasma within a processing chamber of a plasma processing system is provided. The method includes executing a strike step within the processing chamber to generate a plasma. The strike step includes applying a substantially high gas pressure within the processing chamber and maintaining a low radio frequency (RF) power within the processing chamber. The method also includes employing a probe head to collect a set of characteristic parameter measurements during the strike step, the probe head being on a surface of the processing chamber, wherein the surface is within close proximity to a substrate surface. The method further includes comparing the set of characteristic parameter measurements against a pre-defined range. If the set of characteristic parameter measurements is within the pre-defined range, the stabilized plasma exists. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8179152-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8164353-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009322342-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9129779-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8780522-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010007337-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011022215-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010008015-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010007362-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8547085-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9153421-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8849585-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010033195-A1 |
| priorityDate |
2008-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |