| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6ec6b4f2e2fe8eb529027bfe37c9b216
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_82d4d4a4e90532fda6033132681ce788 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-4966
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-495 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28194
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-513
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-517
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-40 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L47-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 |
| filingDate |
2008-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0d1e0ccabc8bf470d181559b6aa84b0c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_50b1fff77850dc95ff3dadbc68632f08 |
| publicationDate |
2009-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2009321707-A1 |
| titleOfInvention |
Intersubstrate-dielectric nanolaminate layer for improved temperature stability of gate dielectric films |
| abstract |
Embodiments of an apparatus with a crystallization-resistant high-κ dielectric and nanolaminate layer stack in a device and methods for forming crystallization-resistant high-κ dielectric and nanolaminate layer stack are generally described herein. Other embodiments may be described and claimed. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10514598-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10831096-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102437042-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019132903-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11209729-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10796912-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8741712-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11257674-B2 |
| priorityDate |
2008-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |