| abstract |
Provided are a polyimide that demonstrates low coefficient of hygroscopic expansion and low water absorption coefficient when used as an insulation film, as well as an ester group-containing tetracarboxylic acid dianhydride expressed by the general formula below, and a novel polyesterimide precursor derived therefrom and polyesterimide, for use in the production of such polyimide: n n n n n n n n n n In the formula, each R is independent and represents a straight or branched-chain alkyl group with 1 to 6 carbon atoms or straight or branched-chain alkoxyl group with 1 to 6 carbon atoms, n is an integer of 0 to 4, and m is an integer of 2 to 4, with the proviso that if m=2, n is an integer of 1 to 4. |