| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0e03fff799851de08e28b9b9384876c5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cbe3abd0e02eebc9c86166302a9a2613
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_544a30232c785c5a560b8737480ba2b5 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C2222-20 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1279
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C22-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02216
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1275
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-145
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-143
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02337
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02351
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C20-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C20-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-122
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1241
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3124
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31608
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1212 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D3-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B17-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F2-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-00 |
| filingDate |
2006-10-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5c6a0ac45e3c8447939670d7fe19c7fe
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6e571b15603271c79bcde32a8561e571
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0437c64061332a423fe5dea5e219a805 |
| publicationDate |
2009-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2009293942-A1 |
| titleOfInvention |
Inorganic Substrate With A Thin Silica Type Glass Layer, Method of Manufacturing The Aforementioned Substrate, Coating Agent, And A Semiconductor Device |
| abstract |
A method of manufacturing an inorganic substrate coated with a thin silica type glass layer of 2 H to 9 H pencil hardness, said method comprising the steps of: coating an inorganic substrate with a cyclic dihydrogenpolysiloxane and/or a hydrogenpolysiloxane represented by a specific unit formula, and curing it; an inorganic substrate coated with a thin silica type glass layer; a coating agent for an inorganic substrate that is composed of a cyclic dihydrogenpolysiloxane and/or a hydrogenpolysiloxane represented by a specific unit formula; and a semiconductor device having an inorganic substrate coated with a thin silica type glass layer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103515104-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015090331-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9704713-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011083711-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10252940-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013340820-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10121602-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014072252-A |
| priorityDate |
2005-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |