| abstract |
To provide an imprinting mold, of which a coating layer formed on its surface is hardly susceptible to peeling, and a process for its production. n An imprinting mold comprising a mold body and a coating layer made of a release agent, formed on the surface of the mold body, wherein the release agent contains a compound of the following formula (1), and a process for its production: n n n n n n n n n n wherein R is Rf-X-, both R are the same group, Rf is a perfluoroalkyl group, X is at least one member selected from —(OC 3 F 6 )—, —(OC 2 F 4 )— and —(OCF 2 )—, provided that the sum of such units is at least 1, Y is an organic group, is an average of n is from 2 to 10, Z is —Si(R 1 ) m (R 2 ) 3-m , R 1 is a hydroxyl group or a hydrolysable group, R 2 is a hydrogen atom or a hydrocarbon group, and m is from 1 to 3. |