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publicationDate 2009-11-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2009284893-A1
titleOfInvention Electrostatic chuck
abstract An electrostatic chuck of the invention includes a ceramic dielectric made of a sintered body containing alumina and titanium oxide, with maximum particle size of segregation bodies of titanium compounds being smaller than average particle size of alumina, the ceramic dielectric having a volume resistivity of 10 8 Ωcm or more and 10 13 Ωcm or less at room temperature.
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