| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-70025
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-70791
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0285
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2035
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-7035
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-70425 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03B27-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03B27-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03B27-72 |
| filingDate |
2006-09-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2035f975d2dded9503651c78e78c22d2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a79f75f443e37b061c456b82f8691002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0286022531def755bfc96d3510373fff |
| publicationDate |
2009-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2009268186-A1 |
| titleOfInvention |
Pattern exposure method and pattern exposure apparatus |
| abstract |
A belt-like work ( 11 ) provided with a photosensitive layer is conveyed in a work conveying direction F at a work conveying speed V. An illuminating section ( 30 ) illuminates a photomask ( 29 ) in an exposure period T synchronized with the work conveying speed V. The photomask ( 29 ) is disposed at a proximity gap from the belt-like work ( 11 ). Mask patterns ( 33 ) on the photomask ( 29 ) are exposed on the belt-like work ( 11 ) to form periodic patterns thereon. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11738579-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I587380-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013114055-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9069257-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017083518-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010304309-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114586474-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013027684-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102019128198-B3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013193136-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8339573-B2 |
| priorityDate |
2005-09-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |