| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_78f5c258c7b094265488aeb98aa1d10b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c2f42246a5ccd03418aad54ceb7c9986
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ed29322caa5bd55281743b92217b5089 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2217-213
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2218-322 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-25
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02131
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31608
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B13-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-402
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B9-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0234
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02359
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C8-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C8-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02164 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B9-00 |
| filingDate |
2006-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1d7f5054f7b54887f7e939efc49596b4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7c5e3cf658302ceeaaa2dfb9fd5d3ddb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_08fc7d410e06fa44d1219a9ebb65c021 |
| publicationDate |
2009-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2009263648-A1 |
| titleOfInvention |
Method of forming metal oxide film, metal oxide film and optical electronic device |
| abstract |
A metal oxide film forming method includes mixing an organic metal compound that is a liquid at room temperature and an organic solvent to form a paste, applying the paste onto a substrate, and oxidizing a metal element in the paste while vaporizing organic substances in the paste by irradiating atmospheric pressure plasma to the paste applied onto the substrate to form a metal oxide film. A metal oxide film composed of three layers is formed on a substrate such as a glass substrate. Such a structure can be obtained by repeating the steps of mixing the organic metal compound that is a liquid at room temperature and the organic solvent to form the paste, applying the paste onto the substrate, and oxidizing the metal element while vaporizing the organic substances in the paste. Also contemplated is an optical electronic device using the metal oxide film. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9671529-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010147682-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10563303-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014022609-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2874181-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8816450-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010289400-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8063563-B2 |
| priorityDate |
2005-10-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |