http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009261065-A1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24355
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-009
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-91
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-505
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-53
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3255
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32495
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B44C1-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
filingDate 2009-04-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b8f12f8e3085bca61142e56986e9bf5d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_44beb4e9bb8320caa3e0e6985c7dfe19
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7a02db22c3089c77bc2ed95a15d0bed8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_65fd983793de83404fb384d54a27a25f
publicationDate 2009-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2009261065-A1
titleOfInvention Components for use in a plasma chamber having reduced particle generation and method of making
abstract Components entirely of ceramic with etched surfaces wherein the etched surface has a surface roughness value or at least about 100 microinches (about 2.54 microns) Ra, and methods of forming such.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112017932-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9394615-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108899295-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021231143-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022310372-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11376822-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021225616-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014202634-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019136396-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012018970-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013284373-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3738136-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014051253-A1
priorityDate 2008-04-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6723437-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5762748-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008169588-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5805408-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6805952-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006043067-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004216667-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6933025-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006086458-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6830622-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6475336-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004224128-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7255898-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7311797-B2
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520551
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9989226
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454436140
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559021
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419557048
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23925
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419549006
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9863
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452498775
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID83679
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23995
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457707785
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559505
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5460341
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1118
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID944
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451818717
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419491804
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559357
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID313
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID62395
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419491185
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5359268
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412584819
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID159374
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419525060

Total number of triples: 78.