| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_44af4f2a399dad4a6d228e9e9d2e0841 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K59-125 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K50-844 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D5-12 |
| filingDate |
2006-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ddb7f4b9b41926ceddf3b0305fd47ed0 |
| publicationDate |
2009-10-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2009252863-A1 |
| titleOfInvention |
Method of manufacturing protection film and method of manufacturing inorganic film |
| abstract |
There is provided is a method of manufacturing a protection film or a method of manufacturing an inorganic film, wherein density of the inorganic film is sufficient. n In the method of manufacturing a barrier film 12 and a sealing film 20 as protection films for protecting an organic EL element 100 and an organic TFT 50, a pre-oxidized inorganic film 120, being not completely oxidized, is formed and the oxidized inorganic film 120 thus formed is oxidized to thereby form a part of the protection film. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011127078-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-4092775-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11778854-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11186059-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8866157-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103229283-A |
| priorityDate |
2005-07-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |