| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_04ddad32093bb39938c9a4a6a7431bc0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5b772932569ff22b8c1c453b9a4d3d75
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8c339bc02d5bca680537c30868a82722
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9aac7428bb5035d2aebe81687d8c5aa0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3ecd16114aace30ed6cbfa575b136bae |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-85986 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67201 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F04B49-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-00 |
| filingDate |
2008-08-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0c5c38a1e07e2ed745781065f28511a1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8ad706dbd19eedd3e4f96323832330cf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fddc185b01b1864cccc1617702f2288a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_df5e79c6631cc90d1323172804d42524
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f449bd5d04c34f044a719433e5072da7 |
| publicationDate |
2009-10-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2009250000-A1 |
| titleOfInvention |
Vacuum processing apparatus |
| abstract |
A vacuum processing apparatus capable of attaining compatibility between the decrease for the number of foreign particles deposited on a sample in a lock chamber and improvement of the throughput, in which an open speed controllable valve is disposed and the depressurization speed can be controlled automatically by a controlling computer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103302672-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019107110-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014014681-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013239693-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9038650-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10443600-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10011898-B2 |
| priorityDate |
2008-04-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |