| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dcca600ec75b24c9671892a8f8e1a843
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_46dcde777e5b3a82e18b3d9f6b60260f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ea61eea95c1502f7beefaccb36b363a1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1afea18aacc615bc50840ef2a409243d |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B15-144113
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B21-0072 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N23-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B15-173
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J3-14 |
| filingDate |
2009-01-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_58109c7eb8773cc507ec709e30d1b228
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_856563cd69bba589df44940b07233bde
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8f8d888ed2ea4b22346fb1cd71f05f92
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5e6da4f1920bdbbc724c53ccdc2b4aec |
| publicationDate |
2009-09-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2009236522-A1 |
| titleOfInvention |
Optical zoom system for a light scanning electron microscope |
| abstract |
For a confocal scanning electron microscope ( 1 ) an optical zoom system ( 41 ) with linear scanning is provided, which not only makes a zoom function possible, in that a variable magnification of an image is possible, but rather which additionally produces a pupil image in the illuminating beam path (IB) [BS] and thereby makes a variable imaging length possible (distance between the original pupil (En.P) [EP] and the imaged/reproduced pupil (Ex.P) [AP]) so that axially varying objective pupil positions can thereby be compensated. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102455500-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010271695-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8705171-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102455500-B |
| priorityDate |
2004-07-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |