| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_38ed56a4b4e8e2315b2b3308bffedb3f |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31111
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02032
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02079 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-461 |
| filingDate |
2008-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cc6513731370442351f412894ef9beeb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6598a119d48906b5c2fda7f00a9ffab6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8a44c8f707d9d047daf2d2324097add5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cef86843012f564eff66037de409b1ec
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b425b7da66621c6f3903ff0c89ef1630
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7f2d0cbb888b5f6becc81e30075aa1ac |
| publicationDate |
2009-09-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2009233447-A1 |
| titleOfInvention |
Control wafer reclamation process |
| abstract |
A method of recycling a control wafer having a dielectric layer deposited thereon involves removing most of the dielectric layer by plasma etching leaving a residual film of the dielectric and then removing the residual dielectric film by a wet etching process. The combination of the dry and wet etching provides effective removal of the dielectric material without damaging the wafer substrate and any residual wet etching byproduct particulate remaining on the wafer substrate is then removed by APM cleaning and scrubbing. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013048767-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10538718-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106128939-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111312584-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8664012-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109308992-A |
| priorityDate |
2008-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |