| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7b744c655c2c1d820d49b924dd9b3a91 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-4035 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-416
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-26 |
| filingDate |
2008-03-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_07a0faafed826db31b619b722c839aa5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2bc4caeea11af60a2e73104bd9805a7c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6383b86b9418acd12152d93dbabca214 |
| publicationDate |
2009-09-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2009229995-A1 |
| titleOfInvention |
Analysis of fluoride at low concentrations in acidic processing solutions |
| abstract |
Low concentrations of fluoride ion in a semiconductor processing solution containing an acid are determined via fluoride ion specific electrode measurements corrected for the effect of the acid concentration. No reagents are used for the fluoride determination. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I795600-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016006434-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8008087-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011203252-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8691074-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012073989-A1 |
| priorityDate |
2008-03-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |