| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-249953 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31633
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02348
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02271
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02214
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02203
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31695
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J7-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B3-26 |
| filingDate |
2008-03-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5d832ed12a0679bfa264e34aeac517a3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b91002b88fe8c2c97a1bc4ce9664628a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_51084c2128fdb384cb2c463e6cdcdfc3 |
| publicationDate |
2009-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2009226694-A1 |
| titleOfInvention |
POROUS SiCOH-CONTAINING DIELECTRIC FILM AND A METHOD OF PREPARING |
| abstract |
A method of preparing a porous SiCOH-containing low dielectric constant (low-k) dielectric film on a substrate is described, wherein the dielectric constant of the low-k dielectric film is less than a value of approximately 4. The method comprises exposing the low-k dielectric film to infrared (IR) radiation and ultraviolet (UV) radiation. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9184047-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9017933-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010041248-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011237080-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9443725-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011232677-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011233430-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10068765-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8642488-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8242460-B2 |
| priorityDate |
2008-03-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |