http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009226667-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_424db9d56b06a23aed410fcf5df652f3 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-265 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24355 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G11B5-73915 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G11B5-8404 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D5-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B5-00 |
| filingDate | 2009-03-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ad297babbbc43ba432f7e606a6822d9b |
| publicationDate | 2009-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2009226667-A1 |
| titleOfInvention | Silicon substrate for magnetic recording and method for manufacturing the same |
| abstract | A Si substrate for a magnetic recording medium having excellent surface flatness without making a processing process and deposition process of a magnetic recording layer complex, as well as a thermal conductivity that is unchanged from a bulk substrate of a single crystal and a polycrystal is provided. A metal film is deposited (S 7 ) on a polycrystalline silicon substrate after rough polishing (S 6 ) and silicidated or silicon-alloyed (S 8 ). Thereafter, the film is subjected to precision polishing (S 9 ) such as CMP polishing to increase the flatness of the substrate. Accordingly, the Si substrate for a magnetic recording medium can obtain a flat and smooth surface without being influenced by a difference between crystal orientations of the polycrystalline grains and the presence of crystal grain boundary, and can obtain heat resistance and a thermal conductivity approximately equivalent to a bulk Si substrate. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013136952-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10759332-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8951652-B2 |
| priorityDate | 2008-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 22.