| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c7edf5889c86ba999c55da80488fa7cd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dd931ca45457a3f9480bb4170b7102f7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bda926d3f8d3130147badaadb7a572d0 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7848
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02381
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02532
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02529
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02639
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0262
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-165 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-36 |
| filingDate |
2008-02-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_52a44f8e14169a6418f5f0bdbbe2cd91
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_653ba066249dfae1ac090b50bafa9585
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4d1c7c225d9e3bbe60d8f97a516d49c9 |
| publicationDate |
2009-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2009215249-A1 |
| titleOfInvention |
Method of forming an embedded silicon carbon epitaxial layer |
| abstract |
Methods for forming embedded epitaxial layers containing silicon and carbon are disclosed. Specific embodiments pertain to the formation embedded epitaxial layers containing silicon and carbon on silicon wafers. In specific embodiments an epitaxial layer of silicon and carbon is non-selectively formed on a substrate or silicon wafer, portions of this layer are removed to expose the underlying substrate or silicon wafer, and an epitaxial layer containing silicon is formed on the exposed substrate or silicon wafers. In specific embodiments, gates are formed on the resulting silicon-containing epitaxial layers. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8466045-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9059286-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102856383-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011215376-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10276688-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102569383-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10256322-B2 |
| priorityDate |
2008-02-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |