http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009206428-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d4260a256b5f28ea7d92b4c1f5b921d0 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-115 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-115 |
| filingDate | 2009-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e0c07d7a1c07580f2c65541f1229fea1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f6b05b2b1b16db752dfaf532d073dd9c |
| publicationDate | 2009-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2009206428-A1 |
| titleOfInvention | Direct Electron Detector |
| abstract | An electron detector ( 30 ) for detection of electrons comprises a semiconductor wafer ( 11 ) having a central portion ( 12 ) with a thickness of at most 150 μm, preferably at most 100 μm, formed by etching an area of a thicker wafer. On opposite sides of the central portion ( 12 ) there are n-type and p-type contacts ( 16, 31 ). In operation, a reverse bias is applied across the contacts ( 16, 31 ) and electrons incident on the layer ( 15 ) of intrinsic semiconductor material between the contacts ( 16, 31 ) generate electron-hole pairs which accelerate towards the contacts ( 16, 31 ) where they may detected as a signal. Conductive terminals ( 24, 32 ) contact the contacts ( 16, 31 ) and are connected to a signal processing circuit in IC chips ( 28, 37 ) mounted to the semiconductor wafer ( 11 ) outside the active area of the detector ( 30 ). The contacts ( 16, 31 ) are shaped as arrays of strips extending orthogonally on the two sides of the intrinsic layer ( 15 ) to provide two-dimensional spatial resolution. In an alternative detector ( 10 ), there is a single contact ( 19 ) on one side to provide one-dimensional spatial resolution. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8338782-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9805910-B1 |
| priorityDate | 2004-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 17.