| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cb5746eb832dced6146d31f543e23b29 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1021
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-153
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-0688 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32139
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-70
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31144
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-203 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26 |
| filingDate |
2007-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3cdaa5442fef8a749471148dc1795e3c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_185d494016f007ad9d90c5c3f2b36d98 |
| publicationDate |
2009-07-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2009170030-A1 |
| titleOfInvention |
Method of making a pillar pattern using triple or quadruple exposure |
| abstract |
Methods of making pillar shaped device array using a triple or quadruple exposure technique are described. A plurality of pillar shaped devices are formed arranged in a hexagonal or rectangular pattern. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8518835-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9257152-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9190118-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8138010-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010219510-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011103127-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8268732-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8107270-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8471355-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7935553-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9696379-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9389876-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9383411-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011117733-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-RE46435-E |
| priorityDate |
2007-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |