| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6a162b65402a9a79580e3ae31dcbf3fa |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24479
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61M37-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61M2037-0053
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-055
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61M2037-0023 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00111
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-201
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61M37-0015 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B3-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03B27-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C33-00 |
| filingDate |
2009-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5216009466b9532997f67a3c01769a42 |
| publicationDate |
2009-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2009162798-A1 |
| titleOfInvention |
Method of manufacturing master plate, method of manufacturing microneedle patch and apparatus exposure apparatus |
| abstract |
A method of manufacturing a master plate includes the steps of forming a photoresist film on a substrate, disposing a photomask having a plurality of island radiation shields on the photoresist film followed by integrating the photomask and the photoresist film, applying light from a light source to the photoresist film through the photomask for selectively exposing the photoresist film, and developing the photoresist film to form a master plate, in which the method includes irradiating the photoresist film with the light from plural directions through the photomask to selectively expose the photoresist film from the respective directions. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103298520-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8828520-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019188844-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11644757-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019050107-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10898703-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010003460-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010305516-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021191282-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8671544-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10922805-B2 |
| priorityDate |
2006-08-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |