| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bdd017fc9e31733088cc5608d9442165
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_72c295a11ea047dda1eed264eec82f72
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2f2262406cd127a0316f719112f7feee |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C2602-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-114
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-106 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C309-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C381-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C309-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D307-33 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D307-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-32 |
| filingDate |
2008-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a923720cb8e244ed36d9bee16467f7ba
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4f5b5b2477577d342906f074768d9a0e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0f8565189b918c2173e8f230e4d5bafd |
| publicationDate |
2009-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2009136868-A1 |
| titleOfInvention |
Photoacid generator compounds and compositions |
| abstract |
The invention provides various ionic and non-ionic photoacid generator compounds. Photoresist compositions that include the novel ionic and non-ionic photoacid generator compounds are also provided. The invention further provides methods of making and using the photoacid generator compounds and photoresist compositions disclosed herein. The compounds and compositions are useful as photoactive components in chemically amplified resist compositions for various microfabrication applications. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8163461-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009258315-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111819495-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8268531-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008187868-A1 |
| priorityDate |
2006-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |