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inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9bc4c198137eaccad85f7f2e30806f93
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publicationDate 2009-05-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2009117274-A1
titleOfInvention Solution based lanthanum precursors for atomic layer deposition
abstract Alkyl cyclopentadienyl precursors for use in ALD processes are disclosed. The present invention particularly relates to La alkyl cyclopentadienyl precursors, such as tris(isopropyl-cyclopentadienyl) Lanthanum.
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