| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ae1b2b37e88e4226dc04bcf140332adb |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02087
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-0042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6708
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67051 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B7-04 |
| filingDate |
2007-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_83956d343ff5211b2748df5628055aaa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d8e56d7fd7c3133bb60d5823909bbf2f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c80aafb782c91a90da72b84f6f9f2fe0 |
| publicationDate |
2009-04-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2009107519-A1 |
| titleOfInvention |
Method and system for chemically enhanced laser trimming of substrate edges |
| abstract |
An apparatus for processing a peripheral portion of a substrate includes a housing and a spin chuck mounted within the housing and configured to support the substrate in a substantially horizontal orientation. The apparatus also includes a fluid dispense nozzle coupled to the housing and proximate to the peripheral portion of the substrate. The fluid dispense nozzle is in fluid communication with a source of a chemical and configured to direct a flow of the chemical to the peripheral portion of the substrate located at a first radial distance from a center of the substrate. The apparatus further includes a light guide optically coupled to a laser source. The light guide is configured to direct radiation to the peripheral portion of the substrate located at a second radial distance from the center of the substrate greater than the first radial distance. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114798272-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105960698-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015147888-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103357621-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9627203-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018068845-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016372317-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102527582-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111508820-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10236192-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013034411-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016336173-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9847226-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111508820-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9691639-B2 |
| priorityDate |
2007-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |