| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_14692b226b8b111c6b10ed44d5a4f0ae
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a442b62c1c5f5f6e145f68e650c7b8f3 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02C20-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F05C2203-0804
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F05D2260-607
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F05C2253-12 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F04D19-042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F04B37-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-448
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32834
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4412
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32844 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-54 |
| filingDate |
2007-02-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dd84d259d77d4ce46081308e95dc7c96
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6335ebaf0889a2dd463572d9712e1c32 |
| publicationDate |
2009-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2009104353-A1 |
| titleOfInvention |
Apparatus For Treating A Gas Stream |
| abstract |
In a method of inhibiting the deposition of aluminium within a vacuum pump during the pumping from a process chamber of a gas stream containing an organoaluminium precursor, chlorine is supplied to the gas stream upstream of the vacuum pump to react with the precursor to form aluminium chloride, which can pass harmlessly through the pump in its vapour phase. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9976055-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015197665-A1 |
| priorityDate |
2006-03-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |