| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f4a752bdf448f5e53cc112f200930037 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L2205-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K2200-0657
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K2200-0239 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1009
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16J15-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L27-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L27-18 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L27-18 |
| filingDate |
2006-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fd51fefa19cb59b9aae764be6e83dbaf |
| publicationDate |
2009-04-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2009093590-A1 |
| titleOfInvention |
Seal Material for Semiconductor Production Apparatus |
| abstract |
A sealing material for a semiconductor manufacturing apparatus includes as rubber components, 80 to 50% by weight of a tetrafluoroethylene-perfluoroalkylvinylether type perfluoro elastomer (FFKM) and 20 to 50% by weight of a fluoroelastomer (FKM) other than FFKM (where FFKM+FKM=100% by weight). |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021253762-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015174988-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014118510-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011009568-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11597816-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114196146-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11566090-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114230950-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021171755-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8450423-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11326040-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8349965-B2 |
| priorityDate |
2005-02-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |