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publicationDate 2009-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2009072403-A1
titleOfInvention Wiring Structure, Semiconductor Device and Manufacturing Method Thereof
abstract A semiconductor device with a high-strength porous modified layer having a pore size of 1 nm or less, which is formed, in a multilayer wiring forming process, by forming a via hole and a wiring trench in a via interlayer insulating film and a wiring interlayer insulting film and then irradiating an electron beam or an ultraviolet ray onto the opening side walls.
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