| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f7fb8e9adad52abb74b28b5975feb57a |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate |
2008-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a815a7a93c4667fb366c4d8132a0f739
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_011c5adc51c4a1354fd21cbd08bb9d4a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8aa760fa945ae6da85d6dbcec0e866e4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6c5fe473bc2be766803e82e13babc950
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_31160624aa1c8bf42b773bcaa4c2e819 |
| publicationDate |
2009-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2009061630-A1 |
| titleOfInvention |
Method for Chemical Mechanical Planarization of A Metal-containing Substrate |
| abstract |
A method using an associated composition for chemical mechanical planarization of a metal-containing substrate (e.g., a copper substrate) is described. This method affords low dishing and local erosion levels on the metal during CMP processing of the metal-containing substrate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015111382-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113956797-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9340707-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9476019-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102770524-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011094568-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011094568-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013217231-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011205011-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9045717-B2 |
| priorityDate |
2007-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |