| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5af117876912f488e52a0821dab05178
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_37dc72d2a81f16080da8c9c58b5a87d1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_298f62c48035baa80debe7184bc378e3 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2875
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-34 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate |
2008-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5a74f63668380259937073c241f2f83d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a39875a907c0ea910ed3a6f66ed71017
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9340e812ecb727d7481c14d3809179ae |
| publicationDate |
2009-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2009058455-A1 |
| titleOfInvention |
Test structure and test method |
| abstract |
The present invention discloses a wafer level test structure and a test method; in which, a heating plate is formed on the wafer for heating a structure to be tested positioned above or adjacent to the heating plate. The heating plate produces heat by electrically connecting to a current. Thus, the heat provided by the heating plate and the electric input/output into/from the structure to be tested are controlled separately and not influenced each other. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9472476-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013193997-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8299809-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I472010-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8415663-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010164508-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102916000-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011068813-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013034119-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9347985-B2 |
| priorityDate |
2007-07-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |