| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_69a4ae662cd6a46490ee45a70e85dc39 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76816
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31144
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B41-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-0207
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B41-41
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B41-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76897 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-76
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-4763
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-10 |
| filingDate |
2007-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7ce09e6cc0225a76245343582d7064a0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2824a334296216be5e888d7518f2b4f7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_72a2bae537217e15f6c0013147a4438a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dd1622574aa3210a22b226d0856adf0a |
| publicationDate |
2009-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2009057743-A1 |
| titleOfInvention |
Integrated Circuit Including Structures Arranged at Different Densities and Method of Forming the Same |
| abstract |
A method of forming an integrated circuit includes forming first structures in a first portion of the integrated circuit and forming second structures, which are arranged more densely than the first structures, in a second portion. The first and second structures are defined by lithography processes using photomasks. At least one of the photomasks includes both openings in a first region for supporting the definition of the first structures and openings in a second region for supporting the definition of the second structures. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10211152-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9224617-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9472455-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9553048-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-112015001895-B4 |
| priorityDate |
2007-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |