http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009053646-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_baeff680fc1e38b588f8625a48929dea http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cf7b5b18ebf598a60bb4ad68d2a80485 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2041 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 |
| filingDate | 2006-04-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5f41f888261722cf823f0007e7ccf989 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6749be57b4b64677457847c13f6200d9 |
| publicationDate | 2009-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2009053646-A1 |
| titleOfInvention | Material for protective film formation and method of forming resist pattern therewith |
| abstract | A material for protective film formation that is used to form an upper-layer protective film for a resist film and that contains at least a polymer component soluble in water or alkali and an alcohol containing a fluorine atom; and a method of forming a resist pattern with the use of the same. Consequently, not only can the degeneration of resist film during liquid immersion exposure by various liquids for liquid immersion exposure, for example, water and the degeneration of liquid immersion exposure liquids per se be simultaneously prevented in the liquid immersion exposure process, but also without inviting an increase of the number of processing steps, the resistance to post exposure delay of the resist film can be enhanced. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010047711-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7951523-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8652751-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009197199-A1 |
| priorityDate | 2005-04-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 114.