| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bcf6af53d64fdd19b36af679f9245305 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K85-221
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K85-225 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32136
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32131 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B13-00 |
| filingDate |
2008-08-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3966ca99152a2d57a5ff5441c1c598ce
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_059828594dcca20af998bc74624a6ca4 |
| publicationDate |
2009-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2009050601-A1 |
| titleOfInvention |
Inert gas etching |
| abstract |
A method of patterning a nanostructure film using a plasma is described. The nanostructure film may substantially comprise carbon and/or carbon nanotubes. The plasma may comprise an inert gas. The plasma may be applied to the nanostructure film at close to atmospheric pressure and room temperature. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015068684-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8034315-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102449825-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015314326-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010276656-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9782963-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012171566-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9599370-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012192859-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2541878-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011003109-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011073563-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104124368-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102034739-A |
| priorityDate |
2007-08-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |