| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0b9226d984b4ce0549a30400a0245e88
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e15adb8e601076a0dff96e5dd34cafbf |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24479
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0153 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C59-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C59-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C99-0085 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B28B11-08 |
| filingDate |
2005-10-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1c42526f92e462979f9ae9ab76e31033
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_61bb2658bd02fc7043df31bb77050ed4 |
| publicationDate |
2009-02-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2009047478-A1 |
| titleOfInvention |
Hierarchical Nanopatters by Nanoimprint Lithography |
| abstract |
A method for forming hierarchical patterns on an article by nanoimprinting is disclosed. The method includes using a first mould to form a primary pattern on the article at a first temperature and a first pressure, the first temperature and the first pressure being able to reduce the elastic modulus of the article; and using a second mould to form a second pattern on the primary pattern at a second temperature that is below the article's glass transition temperature, the forming of the second pattern being at a second pressure. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010252960-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013065794-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015093550-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013216779-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10261223-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2360114-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018311877-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2360115-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9028242-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10159926-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10023673-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11014035-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011195141-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11155007-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9274418-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11667062-B2 |
| priorityDate |
2005-10-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |