abstract |
An inkjet nozzle arrangement for an inkjet printer includes a wafer substrate. A layer of drive circuitry is deposited on the wafer substrate, and subsequent etchant layers are deposited on the drive circuitry to define a nozzle chamber with walls and a roof structure defining an ink ejection port. The arrangement also includes a stacked capacitive actuator arranged in said chamber, said actuator having alternative electrode plates sandwiched between a compressible polymer, wherein activation of the stacked actuator draws the electrode plates together to compress the polymer storing energy therein, with subsequent de-activation releasing said energy to eject ink from the ejection port. |