| abstract |
An NOR flash memory device having a back end of line (BEOL) structure, the BEOL structure including a substrate having a conductive region, a first intermetal dielectric layer formed on the substrate, a first metal line formed on the conductive region, a second intermetal dielectric layer formed on the first metal line and the first inter metal dielectric, a first contact extending through the second intermetal dielectric layer, and a second metal line connected to the first metal line through the first contact. At least one of the first contact and the first and second metal lines is composed of copper and at least one of the first and second intermetal dielectric layers is composed of a low diectrice material. The use of copper metal lines and intermetal dielectric layers composed of a low-k (k=3.0) material makes it possible to improve 40% or more in the time constant delay. |