| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5f8269fd9f6bf419607d0fca2e0d2143
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2f2262406cd127a0316f719112f7feee |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C2603-74 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C69-753
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07H9-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07H15-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07J9-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C41-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C67-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C43-303
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C41-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C41-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03C1-73 |
| filingDate |
2006-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_55612235dfe8c569f534893b467a5504
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a72e51baf07c5b77d6e7bf5d32dc91c5 |
| publicationDate |
2008-12-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2008318156-A1 |
| titleOfInvention |
Adamantane Based Molecular Glass Photoresists for Sub-200 Nm Lithography |
| abstract |
Disclosed are glass photoresists generated from adamantane derivatives containing acetal and/or ester moieties as novel high-performance photoresist materials. Some of the disclosed adamantane-based glass resists have a tripodal structure and other disclosed adamantane-based glass resists include one or more cholic groups. The disclosed adamantane derivatives can be synthesized from starting materials which are commercially available. By way of example only, one of many disclosed amorphous glass photoresists has the following structure: |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009286180-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114031736-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8029975-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I464140-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9513545-B2 |
| priorityDate |
2006-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |