| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-3103 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-73
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N33-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N33-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-308 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-00 |
| filingDate |
2007-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_352e7bc57560deddcc3c3aff2b9805ee
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_045474ea3ab816a7fdb9cac44389c3c4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_46ec8340d3549d5de82350f4b0b52cd5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9c54b8bee1dbdeb42d0cfe9a246d4ffa |
| publicationDate |
2008-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2008302762-A1 |
| titleOfInvention |
Method for Analyzing Quartz Member |
| abstract |
A disclosed method of analyzing a quartz member includes steps of supplying an etchant to an etchant receiving portion formed concavely in the quartz member so as to etch the quartz member; and analyzing the etchant used in the supplying step. |
| priorityDate |
2006-06-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |