| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_40e349329b8e95b23552fff2a6f4ca75
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_753369f61f99a4a2aa4e96d4eff55ac7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c813d042dac18009e91fa4b14fa80e03
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cbbc3317a3fd6c6fe8ca751e9f74f048
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ba43a0913781e5d3f21e768bfb44c661
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9eceebcfbb493243867b07ffdfb82890
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b462db09977315b133edc2cffa631a6c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4e04a7841a29ecfc06549527afe6a423 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32134
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-18 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1365
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B44C1-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-308
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 |
| filingDate |
2008-07-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_57801c62e92be1a96a1b5f49aa4ac0aa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e5bee1d07cc6ab041ee6f7338c8d449c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_19a3600cbf74b820bed0750616dc2e80
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e906ac40465cdca3591fb6e6f27b6ed2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_84159d7d03095c2014db2ed546cb221e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a974d0425cfce06c6ca221eeb3a52e10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_297b49a2e1a0d68047ee253ddd237c43
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_36dbb0aed78e36f83398590c1244af3c |
| publicationDate |
2008-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2008286974-A1 |
| titleOfInvention |
Etching solution for multiple layer of copper and molybdenum and etching method using the same |
| abstract |
An etching solution for a multiple layer of copper and molybdenum includes: about 5% to about 30% by weight of a hydrogen peroxide; about 0.5% to about 5% by weight of an organic acid; about 0.2% to about 5% by weight of a phosphate; about 0.2% to about 5% by weight of a first additive having nitrogen; about 0.2% to about 5% by weight of a second additive having nitrogen; about 0.01% to about 1.0% by weight of a fluoric compound; and de-ionized water making a total amount of the etching solution 100% by weight. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010239818-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9748396-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010301010-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9580818-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8940178-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8440118-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007153222-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8003023-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011297873-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9673342-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9039915-B2 |
| priorityDate |
2002-12-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |