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publicationDate 2008-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2008278062-A1
titleOfInvention Method of fabricating electron emission source, electron emission device, and electron emission display device including the electron emission device
abstract A method is provided for fabricating an electron emission source which can attain improved electron emission efficiency and has simplified manufacturing processes. Also provided are an electron emission display device and an electron emission display device fabricated using the method of fabricating an electron emission source. The method includes forming an electrode, forming a carbide compound thin film on the electrode and forming a carbide-induced carbon thin film layer from the carbide compound thin film using an etching gas. The electron emission device and the electron emission display device each include a first electrode, a second electrode disposed to face the first electrode, and a carbide-induced carbon thin film layer formed to be electrically connected to f the first electrode or the second electrode.
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