| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5e5e4671b3ba1fd59502c47747a80896 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41N3-08 |
| filingDate |
2007-05-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_442b3252982c8c975132a768fea08ae4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2410da3f6c16660d7e2c53f1003cd674
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e993743f69fdef7f37c4df2b6734b979 |
| publicationDate |
2008-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2008271628-A1 |
| titleOfInvention |
Imprint lithography |
| abstract |
An imprint lithography apparatus includes an imprint template operably connected to an imprint actuator. The imprint actuator is actuatable to displace the template along an imprint axis to bring the template into contact with an imprintable medium. The template is connected to the actuator via a bearing configured to permit substantially unrestricted displacement of the actuator relative to the template along an axis substantially perpendicular to the imprint axis during release of the template from the imprintable medium. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104704425-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10908510-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10414087-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10890851-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2940526-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10994470-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9864279-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103477425-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3901698-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10005225-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010252960-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014037044-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11635696-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9274418-B2 |
| priorityDate |
2007-05-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |