| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F18-20 |
| filingDate |
2008-04-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9934d76f5c383f53db84f9b59d623b78 |
| publicationDate |
2008-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2008268376-A1 |
| titleOfInvention |
Positive resist composition for immersion exposure, method of forming resist pattern, and fluorine-containing polymeric compound |
| abstract |
A fluorine-containing polymeric compound obtained by polymerizing only polymerizable monomers represented by general formula (c1-0) shown below: n n n n n n n n n n wherein R 1 represents a hydrogen atom or a methyl group; R 2 represents an aliphatic hydrocarbon group substituted with fluorine atoms, or a group in which a plurality of aliphatic hydrocarbon groups which may be substituted with fluorine atoms are bonded through a linking group containing a hetero atom, with the proviso that at least one of the plurality of aliphatic hydrocarbon groups which may be substituted with fluorine atoms is an aliphatic hydrocarbon group substituted with fluorine atoms. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106483763-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103293856-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017042038-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2189845-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2453308-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9507260-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9980392-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106406028-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107108795-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-101943857-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009253075-A1 |
| priorityDate |
2007-04-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |