| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_96b247e401d0fe204e3b72ef82750551
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ee1dfecb4fdbbc3faaa0c4285ec48ae1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f24c1bbcfb7a5747af82e61209a5bcdb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8f718c3fc8bde1d0d77b68c981ce3c1b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d496cfca8c7923e9cafb2bee07ff7164
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_98f57d92303fb1528f56251aaf651629
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c2bdc86e572510e8b947df9bb3edb374 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24802
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-1173 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-0079
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76849
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0331 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-469
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00 |
| filingDate |
2008-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4e5596fd87b950ff48ad1e6a439a7282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_42f32d2d5a436444ad0e4377b4433220
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_74a1c6ad8ef82ca1eae8f4046a450976
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_da586e342b6e7947195ed99df9a826b2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_99e312c90190136e028d0a7593b60482
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0b3b9b1d62bd5a449d0d4387b4eb25e3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ebad1b26203abc524b16f724c45eceab |
| publicationDate |
2008-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2008265415-A1 |
| titleOfInvention |
Nonlithographic Method to Produce Self-Aligned Mask, Articles Produced by Same and Compositions for Same |
| abstract |
A method for forming a self aligned pattern on an existing pattern on a substrate comprising applying a coating of a solution containing a masking material in a carrier, the masking material having an affinity for portions of the existing pattern; and allowing at least a portion of the masking material to preferentially assemble to the portions of the existing pattern. The pattern may be comprised of a first set of regions of the substrate having a first atomic composition and a second set of regions of the substrate having a second atomic composition different from the first composition. The first set of regions may include one or more metal elements and the second set of regions may include a dielectric. The first and second regions may be treated to have different surface properties. Structures made in accordance with the method. Compositions useful for practicing the method. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2020020523-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9738765-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020072329-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022190229-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10978300-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10662526-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9107291-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014120320-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014120320-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10059820-B2 |
| priorityDate |
2002-11-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |