http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008257262-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ebca25e4f737729fb927875476e58a9f |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4582 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-12 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-458 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-48 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate | 2008-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_19183aef4ab542ef8713cc6283bd6646 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a39d1e871bf67c6d52299706a3d34287 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1aa8228b31f9e17774de0c2f68795a3e |
| publicationDate | 2008-10-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2008257262-A1 |
| titleOfInvention | Susceptor Designs for Silicon Carbide Thin Films |
| abstract | A susceptor is disclosed for minimizing or eliminating thermal gradients that affect a substrate wafer during epitaxial growth. The susceptor includes a first susceptor portion including a surface for receiving a semiconductor substrate wafer thereon, and a second susceptor portion facing the substrate receiving surface and spaced from the substrate-receiving surface. The spacing is sufficiently large to permit the flow of gases therebetween for epitaxial growth on a substrate on the surface, while small enough for the second susceptor portion to heat the exposed face of a substrate to substantially the same temperature as the first susceptor portion heats the face of a substrate that is in direct contact with the substrate-receiving surface. |
| priorityDate | 1997-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 43.