http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008248423-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-106 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-111 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-122 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0047 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C381-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate | 2008-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6ba3d4b81afe3bd34d3a8f0197bfe93b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_47dfc59ffde831488f20bdcd86fb640a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_830b8c370f2092414da814524918af24 |
| publicationDate | 2008-10-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2008248423-A1 |
| titleOfInvention | Chemically amplified resist composition |
| abstract | A chemically amplified resist composition comprising: n (A) a salt represented by the formula (I): n n n n n n n n n n wherein R 21 represents a C1-C30 hydrocarbon group etc., Q 1 and Q 2 each independently represent a fluorine atom etc., andn nA + represents at least one organic cation selected from a cation represented by the formula (Ia):n n n n n n n n n n n wherein P 1 , P 2 and P 3 each independently represent a C1-C30 alkyl group etc.,n na cation represented by the formula (Ib):n n n n n n n n n n n wherein P 4 and P 5 each independently represent a hydrogen atom etc., and a cation represented by the formula (Ic): n n n n n n n n n n wherein P 10 , P 11 , P 12 , P 13 , P 14 , P 15 , P 16 , P 17 , P 18 , P 19 , P 20 and P 21 each independently represent a hydrogen atom etc., B represents a sulfur or oxygen atom and m represents 0 or 1,n n(B) a salt represented by the formula (II):n n A′ +− E (II) n wherein A′ + represents at least one organic cation selected from cations represented by the above-mentioned formulae (Ia), (Ib) and (Ic), and E − represents at least one organic anion selected from an anion represented by the formula (II-1): n − O 3 SQ 3 (II-1) n wherein Q 3 represents a C1-C10 perfluoroalkyl group, and an anion represented by the formula (II-2): n n n n n n n n n n wherein Q 4 represents a C1-C10 perfluoroalkyl group, andn n(C) a resin which contains a structural unit having an acid-labile group and which itself is insoluble or poorly soluble in an aqueous alkali solution but becomes soluble in an aqueous alkali solution by the action of an acid. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9046766-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010009288-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2143711-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10126653-B2 |
| priorityDate | 2007-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 2095.