http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008247044-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1af8df51ce24ca931ae718fb747f6aa0 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B5-0891 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B5-0833 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B5-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B5-08 |
| filingDate | 2008-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2a558206ee2de2f8259efcb6f57c2266 |
| publicationDate | 2008-10-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2008247044-A1 |
| titleOfInvention | Reflective optical element and exposure apparatus |
| abstract | A reflective optical element for a projection optical system includes a base member and a dielectric multilayer film laminated thereon. The multilayer film includes, in an order from a base member side, a first multilayer group constituted by laminating at least four dielectric material layers including at least two dielectric material layers having different refractive indices from each other and has a first period length equivalent in optical film thickness, and a second multilayer group constituted by laminating at least four dielectric material layers including at least two dielectric material layers having different refractive indices from each other and has a second period length equivalent in optical film thickness longer than the first period length. The element has a superior abrasion resistance, a high reflectivity, and a small fluctuation in characteristic of a phase difference between the reflected S- and P-polarized light components depending on the wavelength. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11099308-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018224586-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9297936-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013190005-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018210199-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11378719-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10670863-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11307058-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013083411-A1 |
| priorityDate | 2007-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 37.