http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008239429-A1

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classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B3-0021
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-0833
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B26-08
filingDate 2008-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8e1118273677cf41f7eddf093856c6c0
publicationDate 2008-10-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2008239429-A1
titleOfInvention Method of fabricating a micromechanical structure out of two-dimensional elements and micromechanical device
abstract In a method of fabricating a micromechanical structure, first, a deflectably supported two-dimensional structure is formed in a substrate and, then, is arranged in a package such that an integrated micromanipulator is arranged between the package and the two-dimensional structure so as to effect a deflection of the two-dimensional structure out of a plane of the substrate.
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Total number of triples: 31.