| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9afd626b14ef4bfd1a0cbc8b5bae6a13 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1285 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78675
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66757
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0268
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02691 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20 |
| filingDate |
2008-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bafc1bb5b7a1f76cf7dbcdc63304b3b5 |
| publicationDate |
2008-10-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2008237724-A1 |
| titleOfInvention |
Semiconductor thin film manufacturing method, semiconductor thin film and thin film transistor |
| abstract |
To provide a semiconductor thin film on which crystal grains with large diameters are formed over a wide range. A beam pattern including a plurality of recessed patterns is scan-irradiated to amorphous silicon in a first scanning direction (first crystallization step). Then, a beam pattern is scan-irradiated in a second scanning direction that is different from the first scanning direction by 90 degrees (second crystallization step). As a result, by having band-shape crystal grains formed in the first crystallization step as seeds, the crystal grain diameters thereof are expanded in the second scanning direction. That is, it is possible to obtain new band-shape crystal grains with the expanded grain diameters. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2020066517-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014077209-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8993354-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10971361-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012225568-A1 |
| priorityDate |
2007-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |