| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_286a6277d801c9bc65526b7a7f4640df
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3857656798f1ba2d804bf42be247c461
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_902747f0ca88c878ae2fc6ee711ed3cf |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-612
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-604 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C28-322
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-486
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-91
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32431
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-111
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C28-3455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-009
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B28B11-0818
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4404
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-87
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-53
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-90
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-5042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-5031 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B28B11-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B18-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C59-14 |
| filingDate |
2008-02-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_75e1d2e794620121154db767958f0a6f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_284130ffe89b07297dd728247f5489c8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_395c552f191ce7ce1d1932b26111ca3d |
| publicationDate |
2008-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2008233403-A1 |
| titleOfInvention |
Method of Making Ceramic Reactor Components and Ceramic Reactor Component Made Therefrom |
| abstract |
A method of improving the adhesion of processing materials on a ceramic component is described. The method includes the steps of forming a green ceramic component and texturing the surface of the green ceramic component. The as-textured component is then fired to harden the ceramic material. In an alternative embodiment of the method, a coating is applied to the surface of the as-fired ceramic component to provide a secondary adhesion layer. A ceramic component for use in an etching or deposition reactor chamber is also described. The ceramic component includes a substrate formed of a ceramic material and has a textured surface formed thereon such that the textured surface has a roughness of about 100 to 1000 μin R a . |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111566778-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021225616-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106631045-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3738136-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112979322-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011220285-A1 |
| priorityDate |
2007-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |