http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008232670-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8f063b8222ec3c8e746a415e7f364473 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05B2219-32222 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05B2219-45031 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P90-02 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05B19-4184 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06K9-00 |
| filingDate | 2007-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7166a9259a14db1232f9888e336c7743 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d71388b8c9d43f7000aa8072e45e4583 |
| publicationDate | 2008-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2008232670-A1 |
| titleOfInvention | Method for calculating a bad-lot continuity and a method for finding a defective machine using the same |
| abstract | A method for finding a defective machine comprises the steps of selecting a searching period in which a plurality of wafer lots including good wafer lots and bad wafer lots passes through machines, acquiring a lot-passing information related to the passing sequence of the wafer lots through the machines, calculating a bad-lot continuity by taking the lot-passing information into account, and determining a defective machine by taking the bad-lot continuity into account. The bad-lot continuity is calculated by the steps of determining an impact period based on the aggregation degree of the bad wafer lots, calculating a bad-lot distribution probability in the impact period, and calculating the bad-lot continuity by taking the bad-lot distribution probability into account. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019129402-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10901405-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010049355-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10274942-B2 |
| priorityDate | 2007-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.